CDASS delivers cost-effective, ultra-clean dry air by fully removing moisture and gaseous pollutants such as NH₃, SOₓ, and organic compounds
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(Patent No. 3762138, Patent No. 4334688, Patent No. 4754358, Patent No. 4990443, Patent No. 5409279)
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Features
Supplies ultra-low dew point air using dehumidification rotors in three stages in series
Supplies clean and dry air (CDA) with dust and inorganic gaseous pollutants containing organic and NOx removed at a dew point temperature of -100℃ (8.7 wt ppb) or less
Production and supply of CDA at low cost using dehumidification rotor
The running cost is 1/5 to 1/10 compared with compressed air (pressure swing type). There is no worry of asphyxiation unlike nitrogen gas systems. Supplies a large volume of CDA at 15-30 m3/min at atmospheric pressure
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Features
All-in-one package incorporating heat source equipment
Manufactures and supplies CDA with power connection only
Uses proven dehumidification rotor
A low cost compared with compressed air (pressure swing type)
Cheaper and safer than nitrogen gas systems
Usage Examples
Air supply to the air bearing for substrate conveyance in electronic device manufacturing equipment
Products that dislike moisture or chemical contamination contained in the air
Prevents lens fogging
Prevents moisture adhesion inside vacuum devices
Products that dislike moisture or chemical contamination contained in the air
Prevents reticle haze
Prevents wafer natural oxidation film
Organic EL production lines
